If you can scroll up a couple of messages, there is a convenient link to Atte’s well-written extensive report, which provides the answers.
I’ve been looking into the light source of ASML’s equipment a bit, as ASML is heavily pushing from every channel how the source power will be increased to as much as 1,000 watts in the 2030s. I found an SEM image showing that the heat generated by ASML’s light source is even starting to cause deformations in the mask itself. I guess there’s some irony in this, as the pellicle’s job is to protect the mask, but now the mask itself is starting to turn into toast.
As a recap from yesterday’s ASML earnings release, here is ASML’s roadmap. Low NA is being continuously developed, and when more throughput (WpH in the graph) is desired for the equipment, one factor is that the power of the device must increase.
