SPIE is a conference held annually in California that focuses exclusively on the lithography sector of the semiconductor industry. All the major lithography equipment manufacturers and semiconductor industry fabs participate in the conference. From what I understand, Canatu has also participated in the trade show in recent years. I’ve attended the same event myself in the past, and it provides great insight into future roadmaps.
One of the highlights of the event is when ASML representatives take the stage to discuss future roadmaps and equipment development.
If you are truly interested in the subject, it’s definitely worth downloading those SPIE presentations, although you do have to pay a bit for them. They might also be a bit difficult to read if you aren’t familiar with lithography terminology.